Anisotropic Laplace Refinement for Three-Dimensional Oxidation Simulation

We present a computational method for three-dimensional tetrahedral mesh refinement according to the demands of oxidation simulation. The main focus lies on two major problems. First, the start-up condition of oxidation claims an initial mesh preparation which is done by the so called Laplace refinement, second the transient conversion of silicon (Si) to silicon dioxide (SiO2) forces a high spatial resolution in a small area around the material interface which shows the need of adaptive refinement on demand. More over our approach takes anisotropy into account to keep the amount of elements small compared to strict isotropic refinement.